| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable control and display accurately reflecting a lighting status of plasm in a plasma generator used for workpiece processing such as reforming of a substrate. <P>SOLUTION: Corresponding with a plurality of plasma generating nozzles 31 provided at a plasma generator 30, a spot photometry means 101 capable of accurately measuring photometry for only a luminescent light volume of a plume P is provided, separated from the plasma generator 30, not being an obstacle to transmission of work W, at a fixed position capable of prospecting all plasma generating nozzles 31. A CPU 901 of a whole control part 90 makes the spot photometry means 101 swing and scan by a displacement means 102, and controls a flow control valve 923 of process gas corresponding with scanned brightness. Therefore, control or display reflecting a lighting status of plasma can be obtained, and also, detecting means to detect a lighting status of plasma can be shared among a plurality of plasma generating nozzles. <P>COPYRIGHT: (C)2007,JPO&INPIT |
