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发明名称
摘要
申请公布号	JP3979711(B2)	申请公布日期	2007.09.19
申请号	JP19970285715	申请日期	1997.10.17
申请人		发明人
分类号	H01L21/822;H01L27/04;H01L21/02;H01L21/311;H01L21/314;H01L21/8242;H01L27/108	主分类号	H01L21/822
代理机构		代理人
主权项
地址

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