Oxidation and Moisture Barrier Layers for Wire Grid Polarizer

摘要

A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from oxidation and/or corrosion. The conformal-coating can include a barrier layer with at least one: of aluminum oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, hafnium oxide, and zirconium oxide. A method of making a WGP can include applying the barrier layer over ribs of a WGP by vapor deposition.

主权项

1. A wire grid polarizer (WGP) comprising:
a. ribs located over a surface of a transparent substrate, wherein the ribs are elongated and arranged in a substantially parallel array; b. gaps between at least a portion of the ribs; and c. a conformal-coating located over the ribs, wherein:
i. the conformal-coating comprises two layers of different materials, including an oxidation-barrier and a moisture-barrier;ii. the oxidation-barrier includes aluminum oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, a rare earth oxide, or combinations thereof;iii. the moisture-barrier includes hafnium oxide, zirconium oxide, a rare earth oxide, or combinations thereof;iv. the oxidation-barrier is located between the moisture-barrier and the ribs; andv. the oxidation-barrier is distinct from the ribs.