| 摘要 |
PROBLEM TO BE SOLVED: To remove adverse effects of light leakage and achieve rapid and easy inspection of a pattern product for such defects as holes, cuts, or missing parts.SOLUTION: An inspection pattern member 20 having a translucent pattern 21 corresponding to a pattern 11 of a pattern product 10 to be inspected is arranged between the pattern product 10 to be inspected and an illumination device 40. Further, a vertical light permselective member 30 causing lights in a normal direction to selectively transmit is arranged between the illumination device 40 and an inspection pattern member 20 or between the inspection pattern member 20 and the pattern product 10.SELECTED DRAWING: Figure 3 |
