METHOD OF OBSERVING SAMPLE USING ELECTRON BEAM

摘要

PROBLEM TO BE SOLVED: To provide a method of repeatedly observing the bottom of a contact hole having a high aspect ratio. SOLUTION: The electrostatic charge potentials in a pattern to be observed and the periphery of an observation range are stabilized by pre-charging with stepwise changing the irradiation range of an electron beam. COPYRIGHT: (C)2008,JPO&INPIT