| 摘要 |
PROBLEM TO BE SOLVED: To provide a Co-Fe-Ni-based alloy used as a soft magnetic layer film in a perpendicular magnetic recording medium, and to provide a sputtering target material using the same. SOLUTION: Disclosed is an alloy for a soft magnetic film layer in a perpendicular magnetic recording medium comprising, by atom%, 10 to 45% Fe, 1 to 25% Ni, one or more selected from Zr, Hf, Nb, Ta and B by Zr+Hf+Nb+Ta+B/2:5 to 10% (wherein, B is 0 to 7%), one or two selected from Al and Cr by Al+Cr: 0 to 5%, and the balance ≥37% Co with inevitable impurities, and in which, by atomic ratio, Fe/(Co+Fe+Ni): 0.10 to 0.50 and Ni/(Co+Fe+Ni): 0.01 to 0.25 are satisfied. Also disclosed are a sputtering target material for film-forming the same and a method for producing the same. COPYRIGHT: (C)2010,JPO&INPIT
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