发明名称 |
APPARATUS AND METHOD FOR PLASMA IGNITION WITH A SELF-RESONATING DEVICE |
摘要 |
Methods and apparatus for igniting a process plasma within a plasma chamber are provided. One or more self-resonating devices are positioned within a plasma chamber relative to a plasma generation volume within the plasma chamber. The plasma generation volume is defined by the plasma chamber. Each of the self- resonating devices generates an ignition plasma. The ignition plasmas cause a partial ionization of an ignition gas. The partially ionized ignition gas allows for ignition of a process plasma by applying an electric field to the plasma generation volume. |
申请公布号 |
WO2016126477(A9) |
申请公布日期 |
2016.09.29 |
申请号 |
WO2016US15053 |
申请日期 |
2016.01.27 |
申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
SMITH, Shaun, T.;WALTHER, Steven, R.;WU, Chen |
分类号 |
H01J61/54 |
主分类号 |
H01J61/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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