| 摘要 |
PROBLEM TO BE SOLVED: To provide a light irradiation device and a light irradiation method capable of improving the processing efficiency per footprint.SOLUTION: The light irradiation device irradiates polarized light on a work-piece passing through an irradiation area set in advance. The light irradiation device includes: a plurality of stages arranged in parallel in an isolated manner in a second direction (Y-direction) that is orthogonal to a first direction (X-direction) along which a transport axis passing through the irradiation area extends, each of the stages having a mounting face in parallel to a plane including the first direction and the second direction for mounting each work-piece; a first moving mechanism (X-direction drive mechanism) provided in common to the plurality of stages for simultaneously moving the plurality of stages toward the irradiation area from a standby area set outside of the irradiation area on the transport axis; and rotating mechanisms (θ rotating mechanisms) each being provided individually to the plurality of stages for individually rotating the plurality of stages about the axis orthogonal to the mounting faces.SELECTED DRAWING: Figure 1 |
