| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample storage cell that is enhanced in convenience.SOLUTION: A sample storage cell includes a first substrate having a first opening portion, a second substrate arranged to face the first substrate, and a first thin film which blocks the second substrate side of the first opening portion. Between the first substrate and the second substrate are arranged an observation space between the first thin film and the second substrate in which the sample is placed, and a flow path space for connecting the observation space and the external space. The second substrate has transparency to visible light, and the first thin film has transparency to electron beams.SELECTED DRAWING: Figure 3 |
