STAGE APPARATUS, LITHOGRAPHY APPARATUS AND PRODUCING METHOD OF PRODUCT

摘要

PROBLEM TO BE SOLVED: To provide a stage apparatus advantage in points of maintenance of positioning efficiency and downsizing of apparatus.SOLUTION: A stage apparatus 100 comprises a movable part 14 comprising a reflection member 6 reflecting light from an interferometer and a base member 5 onto which the reflection member 6 is fixed. Herein, the reflection member 6 is a hollow cylindrical member extended along with moving direction of the movable part 14. First wall part of the cylindrical member at the side contacting to the base member 5 comprises a plurality of penetrating holes 6c arranged along with a first line and a second line along with the moving direction. The reflection member 6 is fixed onto the base member 5 via fastening members 12 penetrating the plurality of penetrating holes 6c.SELECTED DRAWING: Figure 1