TRIPLE MODE ELECTROSTATIC COLLIMATOR

摘要

A system includes a first electrode to receive an ion beam, a second electrode to receive the ion beam after passing through the first electrode, the first and second electrode forming an upstream gap defined by a convex surface on one of the first or second electrode and concave surface on the other electrode, a third electrode to receive the ion beam after passing through the second electrode, wherein the second and third electrode form a downstream gap defined by a convex surface on one of the second or third electrode and concave surface on the other electrode, wherein the second electrode has either two concave surfaces or two convex surfaces; and a voltage supply system to independently supply voltage signals to the first, second and third electrode, that accelerate and decelerate the ion beam as it passes through the first, second, and third electrode.

主权项

1. A method of treating a diverging ion beam, comprising;
accelerating and partially collimating the diverging ion beam between a first electrode and a second electrode to create an accelerated and partially collimated ion beam; and decelerating the accelerated and partially collimated ion beam between the second electrode and a third electrode to generate a fully collimated ion beam.