PHOTORESIST COATER FOR UNIFORMLY COATING PHOTORESIST ON SUBSTRATE

摘要

PURPOSE: A photoresist coater is provided to uniformly coat photoresist on a substrate and easily control the thickness of the photoresist coated on the substrate. CONSTITUTION: A photoresist coater includes a photoresist coating unit for coating photoresist on a substrate. The photoresist coating unit includes a main body(10) and a nozzle part(50). The main body has a photoresist container for containing photoresist. The nozzle part includes a plurality of nozzle holes(51) connected to the photoresist container to spray the photoresist. Each of the nozzle holes has a diameter of 1.5 to 50 micrometer.