| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electrical discharge electrode apparatus which can stably draw with improving image resolution, etc. <P>SOLUTION: In the electrical discharge electrode apparatus 1a, a heating unit 3a is provided on a substrate 2. This heating unit 3a is covered with an insulating layer 7. Also, an electrode 8 for discharging to be heated by the heating unit 3a is provided on the insulating layer 7. Further, a protective film 9a is formed on the electrode 8 for discharging. Here, the protective film 9a has a circular hole part 11. An individual discharge electrode part 8b is exposed, and this exposed part is used as a discharge electrode part 10. A difference h between the upper surface of the electrode 8 for discharging and the upper surface of the protective film 9a is made 1μm or more to 250μm or less. Further, as a suitable constitution, the difference h is made 1μm or more to 100μm or less. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
