| 摘要 |
PROBLEM TO BE SOLVED: To remove an electric charge of a wafer mounting table by a simple structure at any time without damaging the insulation of the wafer mounting table. SOLUTION: The wafer mounting table keeps the wafer to inspect electrically a plurality of devices formed on the wafer W. The table is equipped with a first conductive portion 11 to mount the wafer, a second insulating portion 12 to support the first surface, and a plurality of lifter pins 21 moving through a plurality of holes 13 passing the first and second portions. The lifter pins 21 are electrically insulated from the first portion 11 in a lowered state. At least one lifter pin is connected to the ground, and is electrically connected to the first portion 11 when the tip is at a position higher than the upper surface of the first portion 11. COPYRIGHT: (C)2008,JPO&INPIT |
