| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric thin film vibrator which can be manufactured simply and inexpensively. <P>SOLUTION: First, a recess part is formed on a surface of a substrate. Subsequently, a sacrifice layer which has the same thickness as a depth of the recess part and is made of a different material from an insulating film is formed on the surface of the substrate and inside the recess part by a physical vapor deposition. Thereafter, a resist mask and the sacrifice layer formed on the resist mask concerned are removed by a liftoff method. A solution containing a precursor of the insulating film is coated on the surface of the substrate by a spin coating method. The insulating film is formed on the surface of the substrate by sintering. Next, a laminated body of a lower electrode, a piezoelectric thin film and an upper electrode is formed on the surface of the substrate, and the sacrifice layer is etched to form a cavity part under the laminated body. <P>COPYRIGHT: (C)2009,JPO&INPIT |
