MANUFACTURING METHOD OF ELECTRIC APPARATUS AND ELECTRIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an electric apparatus capable of eliminating unevenness in an etching amount of a copper wiring and a blackened layer while maintaining good etching controlling property and further capable of suppressing a reflection factor over the whole wavelength of a visible ray, and provide the electric apparatus.SOLUTION: The manufacturing method of an electric apparatus comprises the processes of: forming a laminate membrane by laminating a Cu layer 2 and a CuNO-based blackened layer 3 in order on at least one main surface of a substrate 1; forming a resist layer 10 in a predetermined area on the laminate membrane; removing an area of the laminate membrane which is not covered by the resist layer by contacting the laminate membrane with an etching liquid; and forming a dielectric layer 4 on the substrate 1 and the patterned laminate membrane. A extinction coefficient of the CuNO-based blackened layer 3 at a wavelength of 400 nm to 700 nm is 1.0 to 1.8.SELECTED DRAWING: Figure 9