发明名称 TESTING THE QUALITY OF SURFACES
摘要 1406470 Photo-electric apparatus INTERNATIONAL BUSINESS MACHINES CORP 20 Dec 1972 [4 Jan 1972] 58903/72 Heading G1A In an apparatus for monitoring irregularities on a periodically structured surface 8 in which a laser beam is scanned - from 2a to 2c - periodically across the surface to produce an interference pattern at a photo-cell assembly 9, the intensity of at least one order of interference is sensed. A laser beam is scanned across the surface 8, e.g. of a magnetic storage disc, by an oscillating mirror 5. For a disc of acceptable quality the machine markings on the disc will have a regular, periodic structure, Fig.2 (not shown) and the disc will hence act as a reflection grating. The assembly 9 is positioned such that the -1, 0, +1 orders of interference fall on photo-cells 12, 10, 11 respectively. A photo-cell 14 monitors scattered light, while photo-cell 13 receives the ¢ order of interference. For a regular surface structure the output from photo-cell 13 will be steady and relatively low, Fig.4, left (not shown). However, irregularities in the machine cut, Fig.3 (not shown) will produce a varying, relatively high output from photo-cell 13, Fig.4 right. The scattered light level output from photo-cell 14 will also be greater in the latter case. The entire disc surface is scanned either by rotating the disc or by rotating the optical system about the disc.
申请公布号 GB1406470(A) 申请公布日期 1975.09.17
申请号 GB19720058903 申请日期 1972.12.20
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人
分类号 G01B11/30;G01N21/89;G01N21/956;(IPC1-7):G01B11/30 主分类号 G01B11/30
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