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发明名称
PHOTOOETCHING METHOD
摘要
申请公布号
JPS52142636(A)
申请公布日期
1977.11.28
申请号
JP19760059521
申请日期
1976.05.21
申请人
MITSUBISHI ELECTRIC CORP
发明人
SUEHIRO KAZUTO;KINOSHITA SHIGEJI;NAGATA KAZUSHI
分类号
C23F1/00;C23F1/02;G03F7/095;H01L21/302;H01L21/306
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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