CHARACTER TEST SYSTEM OF SEMICONDUCTOR DEVICE,申请号JP19770056223-传众专利搜索

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发明名称	CHARACTER TEST SYSTEM OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS53141582(A)	申请公布日期	1978.12.09
申请号	JP19770056223	申请日期	1977.05.16
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	TAKIZAWA SEIJI;SATOU TAKASHI;TACHIBANA CHIAKI;HIROBE KAZUO
分类号	G01R31/26;G01R31/28;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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