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发明名称
HEAT TREATMENT METHOD FOR 335 GROUP COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPS54104770(A)
申请公布日期
1979.08.17
申请号
JP19780011605
申请日期
1978.02.03
申请人
SONY CORP
发明人
KASAHARA JIROU
分类号
H01L21/265;C30B29/40;C30B31/06;H01L21/22;H01L21/324
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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