发明名称 |
VORRICHTUNG ZUR UEBERFUEHRUNG VON GEGENSTAENDEN |
摘要 |
A rotary pickup arm transfers objects from a fixed pickup station to a fixed deposition station during a first part of a work cycle and is returned to the pickup station during a second part of the work cycle. The pickup arm is carried by a head having a support mounted on an X-Y table movable relative to the pickup and deposition station by step motors along X and Y axes perpendicular to the axis of rotation of the pickup arm. The X-Y table can be adjustably displaced by predetermined amounts along the X and/or Y axes during the first part of the working cycle to place an object accurately at a desired location at the deposition station and displaced by an equal and opposite amount during the second part of the working cycle to pick up a further object from the pickup station. By this means objects may be transferred from the pickup station to precise locations on a carrier at the deposition stations so that (a) misplacement of the carrier relative to the pickup station location can be compensated and/or (b) several objects may readily be located precisely at different locations on the carrier. |
申请公布号 |
DE2823360(A1) |
申请公布日期 |
1979.12.06 |
申请号 |
DE19782823360 |
申请日期 |
1978.05.29 |
申请人 |
TEXAS INSTRUMENTS DEUTSCHLAND GMBH |
发明人 |
HEIM,RICHARD;FISCHER,GEORG |
分类号 |
H01L21/00;H01L21/60 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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