发明名称 VORRICHTUNG ZUR UEBERFUEHRUNG VON GEGENSTAENDEN
摘要 A rotary pickup arm transfers objects from a fixed pickup station to a fixed deposition station during a first part of a work cycle and is returned to the pickup station during a second part of the work cycle. The pickup arm is carried by a head having a support mounted on an X-Y table movable relative to the pickup and deposition station by step motors along X and Y axes perpendicular to the axis of rotation of the pickup arm. The X-Y table can be adjustably displaced by predetermined amounts along the X and/or Y axes during the first part of the working cycle to place an object accurately at a desired location at the deposition station and displaced by an equal and opposite amount during the second part of the working cycle to pick up a further object from the pickup station. By this means objects may be transferred from the pickup station to precise locations on a carrier at the deposition stations so that (a) misplacement of the carrier relative to the pickup station location can be compensated and/or (b) several objects may readily be located precisely at different locations on the carrier.
申请公布号 DE2823360(A1) 申请公布日期 1979.12.06
申请号 DE19782823360 申请日期 1978.05.29
申请人 TEXAS INSTRUMENTS DEUTSCHLAND GMBH 发明人 HEIM,RICHARD;FISCHER,GEORG
分类号 H01L21/00;H01L21/60 主分类号 H01L21/00
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