发明名称 Semiconductor device and method of making the same
摘要 A semiconductor device and a method of manufacturing the same, wherein there are provided, on a semiconductor substrate of a first conductivity type, a first and a second epitaxial layer each having a second conductivity type opposite to the first conductivity type. A plurality of regions are defined in the entire area of the epitaxial layer by being isolated by means of an isolation layer of the first conductivity type which extends from the surface of the second epitaxial layer to the semiconductor substrate. Furthermore, a first buried layer of the second conductivity type is formed in each of the isolated regions in such a manner as to extend in the first epitaxial layer and semiconductor substrate so that a transistor can be formed on each first buried layer.
申请公布号 US4260999(A) 申请公布日期 1981.04.07
申请号 US19790028022 申请日期 1979.04.06
申请人 TOKO, INC. 发明人 YOSHIOKA, FUMIO
分类号 H01L21/761;H01L21/8222;H01L21/8228;H01L27/082;(IPC1-7):H01L29/72 主分类号 H01L21/761
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