| 摘要 |
PURPOSE:To make glow discharge stable and uniform and to form a uniformly deposited film by disposing plural pieces of pipes as the other electrode in the cylindrical electrode of a plasma CVD device roughly in parallel with the central axis of said cylindrical electrode. CONSTITUTION:Plural pieces of metallic pipes as an anode electrode 14 are disposed around a base body 2 at an equal interval in parallel with the central axis of a cylindrical cathode electrode 1 on the concentrical circumference centering at said axis. The inside of the chamber is evacuated to a vacuum and the body 2 is rotated and is heated with a heater 8 to attain a uniform temp. distribution. A gaseous raw material is supplied from a pipe 6 to the chamber and is released uniformly toward the body 2 through a gas chamber 1a, a metallic pipe 13 and release holes 11. A high frequency voltage is impressed to the electrode 1 from a high frequency power source 5 to generate glow discharge between said electrode and the anode electrode 14. A radial reaction of gaseous molecules is effected by the bombardment of the electrons driven from the electrode 11 against the gaseous molecules of the electron to deposit the gaseous molecules on the base body 2, thereby forming a deposited film thereon. |
