| 摘要 |
PURPOSE:To efficiently obtain atomic beam in reduced power consumption and to also eliminate insulating inferiority caused by the adhesion of turn-around particles or a problem relating to the adabtability of a molten substance and receiving tray material, by obtaining atomic beam from an ion source by sputtering due to ion beam. CONSTITUTION:Ion beam 22 generated from an ion source 21 is accelerated by an ion acceleration part 23 and allowed to irradiate a substrate 24 aiming isotope separation supported by a holder. Issued-out atomic particles 25 pass a collimator 26 and are converted to atomic beam having directionality to reach a laser irradiation part 28. Herein, by simultaneously irradiating atomic beam 27 with selective exciting laser 29 and ionization laser 30, the isotope to be separated in the atomic beam is excited selectively and ionized to obtain ions 31 of the isotope to be separated while the isotope to be separated in separated and recovered in an isotope separation part 32.
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