| 摘要 |
PURPOSE:To protect a thin metallic film on a substrate from oxidation by water or oxygen attacking through the substrate by interposing a protective layer of a metallic carbide between the substrate and the thin metallic film. CONSTITUTION:A protective layer of a metallic carbide having about 100Angstrom - 1mum thickness is formed on a glass or plastic substrate by vacuum deposition, ion plating, sputtering or other method. A thin metallic film of Al, Ag, Fe, Mn, Tb, Bi or Gd is then formed. The metallic carbide is selected among the carbides of Si, W, Cr, Mo, Ta, Ti, Ni, Nb and Hf. The thin metallic film formed on the substrate can be prevented from being oxidized from the substrate side. |
