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发明名称
MOS DOSIMETER
摘要
申请公布号
JPS60230078(A)
申请公布日期
1985.11.15
申请号
JP19850075264
申请日期
1985.04.09
申请人
HAAN MAITONERU INST FUYUURU KERUNFUORUSHIYUNGU BERURIN GMBH
发明人
MAINHARUTO KUNOORU;DEIITORITSUHI BUROONITSUHI;UORUFUGANGU FUAARUNERU
分类号
G01T1/02;H01L31/113;H01L31/119
主分类号
G01T1/02
代理机构
代理人
主权项
地址
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