| 摘要 |
PURPOSE:To enable the control of an air pressure in a wide range with a high response, by arranging a plurality of flappers and nozzles different in the diameter facing each other in an apparatus in so designed that a flapper is displaced to obtain a desired air pressure varying the nozzle back pressure. CONSTITUTION:A pilot valve 5 is provided with a plurality of nozzles 4a and 4b different in the diameter. Flappers 3a and 3b are arranged to face the nozzles 4a and 4b. The output air pressure of the pilot valve 5 is detected with a pressure sensor 6, the detection signal (the feedback signal) of which is compared with the set voltage by a comparator 8 and the comparison output is used to control a bimorph 2 mounted on the flappers 3a and 3b. Thus, two flappers 3a and 3b can be used for switching according to the set value and the deviation value of the air pressure and the like thereby enabling a control with a better response or in a wide range.
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