| 摘要 |
PURPOSE:To enable an IC to be stably guided with accuracy so as to make the measurement for inspection with ease by configurating a device in such a way that the both sides of a metal member, the width of which is smaller than a space between both side pins of the IC, is covered with an insulating ceramic coating in a guide rail of an IC handler. CONSTITUTION:The configuration is such that a metal guide rail 30 in a 'T' shaped cross section, the width of which is smaller than a space between both side pins of an IC except the both ends, has an upper guide surface 30a in the center section, which mates with the slide surface of the IC. And, the edge portion of the both side surfaces, the lower surface, and the guide surface 30a of the IC guide portion in the center section except the main portion of the guide surface 30a, is covered with a ceramic coating layer 31. This ceramic coating layer 31 is formed in such a way that it is locally baked by means of a plasma spray coating. This configuration enables a simple guide mechanism in a thin form to be employed allowing the IC to be stably guided with accuracy.
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