| 摘要 |
PURPOSE:To obtain a photomagnetic recording film with an enhanced photomagnetic effect by incorporating a crystalline part having 10-500Angstrom grain diameter into the amorphous rare earth metal-transition metal alloy in an amorphous alloy film. CONSTITUTION:A vessel 1 communicates with a vacuum evacuation system 5 and a gaseous Ar introducing system 6. An RF electric power source 7 for supplying high-frequency electric power between a substrate 3 and a target 4 and a DC electric power source 8 for impressing a negative bias voltage to the substrate 3 are connected in series between an anode and a cathode. An amorphous alloy film in the optical recording medium is formed by a high- frequency sputtering device. The amorphous alloy film is directly formed on a discoid and grooved acrylic substrate as the substrate 1 having 200mm diameter. Then a protective film of Si3N4, etc., is immediately formed on the formed amorphous alloy film while keeping the vacuum conditions. By such film formation, a photomagnetic recording medium contg. a crystallite part having 50-500Angstrom grain diameter in the amorphous structure of the amorphous alloy film is obtained. Besides, the alloy film consists of a rare earth metal-transition metal alloy.
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