| 摘要 |
PURPOSE:To improve the heating efficiency of a crucible and to eliminate the clogging of a nozzle by forming the lid part of the crucible provided with the nozzle of the title thin film forming device with a heat-resistant metallic material. CONSTITUTION:A nozzle 27 is provided to the lid part 51 of a crucible 5 of a thin film forming device, the inside of the crucible is heated and pressurized and the vapor of a vapor deposition substance 4 arranged in the crucible 5 is injected from the nozzle 27 into a high-vacuum region and deposited on a substrate. The lid part 51 of the crucible 5 is formed with a heat-resistant metallic material such as tantalum, tungsten and molybdenum.
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