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发明名称
VORRICHTUNG ZUR RAEUMLICHEN BEGRENZUNG EINES PLASMAS
摘要
申请公布号
DD242828(A1)
申请公布日期
1987.02.11
申请号
DD19850283199
申请日期
1985.11.25
申请人
VEB ZFT MIKRO,ELEKTRONIK,,,DD
发明人
KLEINERT,MICHAEL,DD;MOELLER,RAINER,DD;FABIAN,LUTZ,DD
分类号
C23C14/34;C23C14/54;(IPC1-7):C23C14/54
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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