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发明名称
FORMATION OF FINE PATTERN
摘要
申请公布号
JPS6239015(A)
申请公布日期
1987.02.20
申请号
JP19850178334
申请日期
1985.08.13
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NAGANO KAZUTOSHI
分类号
H01L21/306;G03F7/20;H01L21/027;H01L21/30
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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