发明名称 Inorganic-polymer-derived dielectric films
摘要 A method of coating a substrate with a thin film of a polymer of predetermined porosity comprises depositing the thin film on the substrate from a non-gelled solution comprising at least one hydrolyzable metal alkoxide of a polymeric network forming cation, water, an alcohol compatible with the hydrolysis and the polymerization of the metal alkoxide, and an acid or a base, prior to depositing the film, controlling the structure of the polymer for a given composition of the solution exclusive of the acid or base component and the water component, (a) by adjusting each of the water content, the pH, and the temperature to obtain the desired concentration of alkoxide, and then adjusting the time of standing of the solution prior to lowering the temperature of the solution, and (b) lowering the temperature of the solution after the time of standing to about 15 degrees C. or lower to trap the solution in a state in which, after the depositing step, a coating of the desired porosity will be obtained, and curing the deposited film at a temperature effective for curing whereby there is obtained a thin film of a polymer of a predetermined porosity and corresponding pore size on the substrate.
申请公布号 US4652467(A) 申请公布日期 1987.03.24
申请号 US19850704697 申请日期 1985.02.25
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE UNITED STATES DEPARTMENT OF ENERGY 发明人 BRINKER, C. JEFFREY;KEEFER, KEITH D.;LENAHAN, PATRICK M.
分类号 B05D5/12;C08G79/00;C09D4/00;H01B3/30;H01L21/312;(IPC1-7):B05D5/06;B05D7/24 主分类号 B05D5/12
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