Cooled deformable mirror

摘要

A cooled deformable mirror having a continuous mirror surface and a method for cooling a deformable mirror having a continuous mirror surface are disclosed. In the preferred embodiments, one or more enclosed spaces within the mirror's faceplate are supplied with coolant through one or more actuators used to deform the mirror surface and one or more other of the actuators are used to remove coolant from the mirror faceplate. The deformable mirror includes a base manifold which receives coolant from an external source and distributes the coolant to selected ones of the actuators for distribution within the faceplate. Coolant removed from the faceplate by others of the actuators is returned to the base manifold from which it is returned to the external source. Another preferred embodiment further includes a coolant distribution manifold in the faceplate to facilitate the distribution of coolant within the faceplate after the coolant has been delivered to the faceplate by the apertures in one or more actuators. In the preferred embodiments, the coolant is also circulated through spaces within the base manifold to remove heat from the base.