| 摘要 |
PURPOSE:To remarkably improve the hardness of an amorphous carbon film contg. hydrogen by incorporating Cr into the carbon film. CONSTITUTION:A substrate 5 is set on an electrode 6 provided with a built-in heater 7 in a vacuum vessel 1, an electrode 2 is placed opposite to the substrate 5 and a screen mesh 3 made of Cr is placed between the electrodes 2, 6. A rotary pump 9 is worked to evacuate the vessel 1 and gaseous hydrogen 11 mixed with 1-5% methane is introduced into the vessel 1 from the gas introducing inlet 4. DC voltage is applied to the electrode 2 to generate DC glow plasma between the electrode 2 and the grounded screen mesh 3. At the same time, voltage is applied to the electrode 6. An amorphous carbon film is formed on the substrate 5 and Cr forming the screen mesh 3 is impacted by ions of the plasma and introduced into the carbon film. The amount of Cr introduced is regulated to 100ppm-1% by atom.
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