| 摘要 |
PURPOSE:To reduce deterioration in the strength of a baffle by means of gas cooling by providing said baffle in which plural holes are provided in a hollow conductor, in a discharge room and making a gas flow in said hollow conductor. CONSTITUTION:A baffle 7 is formed with a hollow conductor on which plural holes are provided and placed in a discharge room, and an Xe gas is introduced into a hollow part and blown out of the holes. The distribution of ionized plasma produced by the collision of electrons which are accelerated by an electric field between a hollow cathode 1 and an anode 2 with the Xe gas becomes uniform. The baffle 2 is cooled with the gas while having the function of introducing the gas. Accordingly, the deterioration in the strength of the baffle can be reduced by gas cooling.
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