发明名称 VACUUM PROCESSING APPARATUS
摘要 PURPOSE:To make it possible to perform transfer between stations in one transfer process, by providing the stations for sample input, sample processing and sample output each having a sample conveying means and a sample delivery means. CONSTITUTION:An unprocessed sample 10 on a sample input station is held at the upper stage of a sample holding tool 24. The sample 10 is moved from the sample input station 30 to a sample processing station 40. The processed sample 10 on the sample processing station is held at the lower stage of the sample holding tool 24 and moved to a sample output station 50 from the sample processing station 40. The processed sample 10, which is held at the lower stage of the sample holding tool 24 is delivered to the sample output station 50. Then, the sample holding tool 24 is moved in the reverse direction, and the unprocessed sample 10, which is held at the upper stage of the sample holding tool 24, is delivered to the sample processing station 40. Each station has a sample conveying means and a sample delivery means. Thus the transfer of the samples can be performed in one transfer process between the stations.
申请公布号 JPS62181439(A) 申请公布日期 1987.08.08
申请号 JP19860021957 申请日期 1986.02.05
申请人 HITACHI LTD;HITACHI TECHNO ENG CO LTD 发明人 YAMAMOTO NORIAKI;MATANO KATSUJI;KAWAMURA TAKAYASU
分类号 H01L21/205;C23F1/00;C23F4/00;H01L21/302;H01L21/3065;H01L21/31;H01L21/67;H01L21/677;H01L21/68 主分类号 H01L21/205
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