| 摘要 |
PURPOSE:To identify accurately a detection range where a specimen is located, by signal-processing infrared ray detecting element outputs of No.1, No.2 light- receiving optical systems. CONSTITUTION:The No.1 light-receiving optical system 1 is provided with a plurality of infrared ray detecting elements. And, the No.2 light-receiving optical system 2 with a single element and with a detecting range crossing that of the system 1. And, a scanning optical system 3 scans the optical systems 1, 2 for making the detecting range variable and by an output signal of the optical systems 1, 2 processed in a signal processing unit 4. Thus, by making a overlapped portion of detecting range of each infrared detecting element of the optical systems 1, 2 as a detecting range, the detecting range can be specified. Further, the optical system 1 is provided with a plurality of infrared detecting elements and consequently the specified detecting range can further be divided into finer divisions enabling minute position identification of the specimen. Further, as an existing position of the specimen is detected from 2 directions, effects of variations, etc. of the detecting range by temperatures can be reduced.
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