| 摘要 |
PURPOSE:To enable an electrode to be used for a long time even under the condition of a large power, or a large amplitude, by form ing at least a part of the electrode which excites, propagates, or reflects an elastic surface wave in a specific laminated structural film. CONSTITUTION:A part at least of the electrode which excites, propagates, or reflects the elastic surface wave arranged on an elastic surface substrate is formed in a laminated structural film by pilling up the first layer made of a pure Al, or an Al film on which the first impurity is added in low concentration, and the second layer made of the Al film on which the second impurity is added in the low concentration, and the second impurity is selected from either a Ti, a Cr, a V, or a Mn. In this way, it is possible not only to increase a withstand power characteristics by three-fold or more comparing with the electrode in which a Cu is added in the Al, but to facilitate a dry etching, and to increase a wire bonding yield.
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