PRODUCTION OF MAGNETO-OPTICAL RECORDING MEDIUM

摘要

PURPOSE:To obtain a film having good uniformity by using a TbFeCo metal as a target and subjecting the same ion beam sputtering in a gaseous Ar atmosphere under a prescribed reduced pressure to form a thin ternary amorphous TbFeCo film having the axis of easy magnetization in the direction perpendicular to the film plane on a substrate. CONSTITUTION:The TbFeCo metal is used as the target and is subjected to the ion beam sputtering in the gaseous Ar atmosphere of 10<-5>-10<-4>Torr atmosphere to form the thin ternary amorphous TbFeCo alloy film having the axis of easy magnetization in the direction perpendicular to the film plane on the substrate 5. Since the film formation is executed under the low gaseous pressure in the above-mentioned manner, the amt. of the gases such as Ar and impurities to be incorporated into the film is considerably reduced. Since the formation of the Ar ions is executed by an ion source 2, the target surface is substantially uniformly sputtered without generating plasma or voltage difference between the target 3 and the substrate 5. The uniformity of the film compsn. is thus improved. There is therefore no need for biasing the substrate and the pretreatment for applying electrical conductivity to the substrate 5 is omitted.