| 摘要 |
PURPOSE:To provide high accuracy while there is no jump in the frequency temperature characteristic by polishing the surface of a piezoelectric raw mate rial and attaching an exciting electrode by vapor deposition or sputtering and polishing the surface of the exciting electrode. CONSTITUTION:An At-cut crystal oscillation chip 1 is cut off in the direction of thickness-shear vibration from a raw crystal, the surface is polished by a polishing machine, the processed layer at polishment is removed by etching and the result is rinsed sufficiently. The exciting electrode 2 made of a metal such as Ag or Au and Cr as the background, if required, is attached by vapor- deposition or sputtering. Since the polishnent is applied after the exciting electrode 2 is provided, the surface of the exciting electrode 2 is smooth, no discontinuous part is caused in the temperature characteristic of the oscillating frequency of the piezoelectric oscilation chip and the piezoelectric oscillation chip 1 with high accuracy is obtained. Further, the vibrating characteristic is improved and also the excellent aging characteristic is attained.
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