发明名称 PROCESS FOR PROTECTING VAPOR-DEPOSITED METAL LAYERS
摘要 A process for improving the abrasion resistance of vapor deposited metal layers which comprises vapor depositing a metal layer on at least one surface of a substrate and, before subjecting the metal layer to physical treatment or contact which would abrade the metal layer, vapor depositing onto said metal layer 1) a 1 to 600 nm layer of organic material having a vapor pressure at 20 DEG C equal to or less than that of 1-n-octanol said material having a) a carbonyl group not part of a carboxyl group, b) a phenoxy group, c) an ester group, or d) an alcohol group, or 2) a layer of organic material having a thickness of at least 1 nm and less than 30 nm and a) a carboxyl group, b) a saccharide, c) Rhodamine B, or d) phthalocyanine. The organic materials can improve the properties of the metal layer when used in photoresist imaging films.
申请公布号 EP0176693(A3) 申请公布日期 1988.04.13
申请号 EP19850109628 申请日期 1983.02.21
申请人 MINNESOTA MINING AND MANUFACTURING COMPANY 发明人 CEDERBERG, BARBARA M.;DOWNING, EDWARD J.;FISCH, RICHARD S.
分类号 B05D7/24;C23C14/56;G03F1/68 主分类号 B05D7/24
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