| 摘要 |
PURPOSE:To rapidly execute a correct reference by previously obtaining a feature point, storing a position coordinate and the quantity of dislocation in a storage device and correcting a pattern position at the time of the reference. CONSTITUTION:The pattern is inputted from an input device 2, the feature point of the pattern is detected by a detecting means 11, the position coordinate of the detected feature point is obtained and inputted to a means 12 for obtaining the quantity of variance and the average position coordinate of the coordinate of the feature point and the quantity of the unevenness are stored in the picture storage device 3 according to the plural inputs of the same pattern. At the time of referring to a picture pattern, the pattern is inputted from the input device 2 to temporarily detect the feature point, it is fed to a comparator 5 through a temporary storage device 4 and compared with and referred to pattern data read from the picture storage device 3. In an ordinary time, it cannot be referred, so that the quantity of variance is read from the picture storage device 3 and a picture of the position of the feature point is moved within a range is compared and referred. Thereby, the correct reference can be rapidly carried out.
|
