| 摘要 |
PURPOSE:To perform a large rotary angle displacement generating mechanism having a small size and a high speed response possibility by providing a plate thickness step on the opposed side of piezoelectric substrates of both sides split by a slit, forming electrodes on four surfaces of the substrate in thicknesswise direction, and disposing a shim on one end face of thicknesswise direction. CONSTITUTION:A basic piezoelectric element is formed pi-shape as a whole configuration to have a structure having thicknesswise difference in the deflection displacing direction of a piezoelectric element 1, electrodes 2a, 2b are formed on both side surfaces of the element 1 in thicknesswise direction, and a reinforcing shim 3 is bonded to one side of the electrode 2b. Further, a plurality of basic piezoelectric elements are bonded in zigzag shape through the shim 3 in a laminated structure. That is, a unimorph deformed in deflection is structured in a bimorph type, and positive and negative voltages are applied in zigzag to the deflection deforming sections of the respective bimorphs to generate normal and reverse deflection deformations alternately in laminating direction to provide a movable mechanism having small size, high speed and low power consumption.
|
