发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To inhibit stress changes and stress concentration near a gate and the edge of an insulating film for a Schottky FET, etc., by applying the insulating film onto a semiconductor operating layer near a gate electrode. CONSTITUTION:When an insulating film 6 consisting of SiO2 is applied onto an operating layer near a Schottky gate 1 with the exception of the gate 1, stress changes and stress concentration near the gate and the edges of the insulating film are made smaller than there is the insulating film on the gate 1. Accordingly, the charge fluctuation of the operating layer is inhibited, thus preventing the generation of the alteration of the threshold of a Schottky FET, etc.
申请公布号 JPS63248179(A) 申请公布日期 1988.10.14
申请号 JP19870082341 申请日期 1987.04.02
申请人 NEC CORP 发明人 HOJO SAKAE;KANAMORI MIKIO
分类号 H01L21/314;H01L21/31;H01L21/338;H01L29/80;H01L29/812 主分类号 H01L21/314
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