| 摘要 |
PURPOSE:To simplify the structure, and to simplify arithmetic operation for detection by detecting the force in three directions and the moment in three direction working on a point of application, based on the resistance variation of plural resistance elements. CONSTITUTION:On the surface of a strain-generating body 10, 16 sets of resistance element groups R1-R16 are formed. The strain-generating body 10 consists of a single crystal substrate of silicon, and each resistance element of the resistance element groups R1-R16 is formed by diffusing an impurity onto this single crystal substrate. In such a state, since a fixing part 11 is fixed to the outside, when force or moment is applied to a point of application P, a stress strain corresponding to this force or moment is generated in bridge parts 12-15, and the variation of an electric resistance is generated in the resistance element groups R1-R16.
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