| 摘要 |
PURPOSE:To secure stable discharge each time by using a permanent magnet and a magnet coil as an impressing device for a magnetic field, and at a point of time when discharged, cutting off the field of the magnet coil. CONSTITUTION:A vacuum chamber is maintained in a vacuum of 5X10<-4> Toor in the state that argon gas is made to flow out of a gas inlet port 11. The gas taken out of this gas inlet port 11 is discharged by the microwave taken out of a microwave inlet port 12, a permanent magnet 18 generating a magnetic field of about 875 gauss inside the vacuum chamber and an axial field by a magnet coil 13. If the field by the magnet coil 13 is cut at a point of time when discharge occurs, discharge is maintained by the field of the permanent magnet 18 and the microwave even if the field is cut like, and the ion produced by this discharge is moved toward a processing substrate 17 by ambipolar diffusion of an electron and the ion, handling this processing substrate 17. With this constitution, stable discharge is securable.
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