| 摘要 |
PURPOSE:To prevent generation of wrinkles and thermal damages in a high-polymer film by impressing specific negative voltage on a can and bias roller in contact with the film at the time of depositing a thin metallic film by evaporation further to the film previously having the thin metallic film in a vacuum vessel. CONSTITUTION:The high-polymer film 2 on which the thin metallic film consisting of Ti, etc., is previously adhered and formed is un-wound from an un-winding roll 1 and is moved along a cylindrical metal can 3. After the thin alloy film of CoCr, etc., from an evaporation source 5 is deposited by evaporation on the film, the film is taken up on a take-up roll 6. The bias roller 7 is interposed between the roll 1 and the can 3 and the different negative voltage which are not the ground voltage are applied on the bias roller and the can 3, i.e., Vb on the former and Vc on the latter. Both the potential of the thin metallic film on the film and the potential of the can in the position where the film 2 begins to touch the can 3 are maintained at the negative potential and the potential difference therebetween is made smaller than the potential difference in the vapor deposition position, by which the generation of the wrinkles and thermal damages in the film 2 on the inlet side of the can is prevented.
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