发明名称 |
Method for synthesis of diamond and apparatus therefor. |
摘要 |
This invention provides a method for synthesis of diamond by contacting a substrate with a mixed gas of carbon source gas and hydrogen gas activated by irradiation with microwave to produce plasma, thereby to deposit diamond on the surface of the substrate wherein microwave is introduced from a plurality of directions to the substrate and an apparatus for synthesis of diamond which comprises at least one microwave oscillator which oscillates microwave, a plurality of waveguides for introducing from a plurality of directions the microwave oscillated from said microwave oscillator to a substrate for deposition of diamond, and a reaction chamber which is connected to said waveguides and in which diamond is deposited by generation of plasma thereby to form a diamond thin film on the surface of said substrate. |
申请公布号 |
EP0305903(A1) |
申请公布日期 |
1989.03.08 |
申请号 |
EP19880113896 |
申请日期 |
1988.08.25 |
申请人 |
IDEMITSU PETROCHEMICAL COMPANY LIMITED |
发明人 |
ITO, TOSHIMICHI C/O IDEMITSU PETROCHEMICAL |
分类号 |
C30B29/04;B01J3/08;C03B29/04;C23C16/27;C30B25/02 |
主分类号 |
C30B29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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