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发明名称
PLASMA ETCHING DEVICE
摘要
申请公布号
JPH0196931(A)
申请公布日期
1989.04.14
申请号
JP19870255372
申请日期
1987.10.09
申请人
MITSUBISHI ELECTRIC CORP
发明人
MATSUMURA TAMIO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
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